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KMID : 0381920150450030183
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Korean Journal of Microscopy
2015 Volume.45 No. 3 p.183 ~ p.188
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Three-Dimensional Automated Crystal Orientation and Phase Mapping Analysis of Epitaxially Grown Thin Film Interfaces by Using Transmission Electron Microscopy
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Kim Chang-Yeon
Lee Ji-Hyun
Yoo Seung-Jo
Lee Seok-Hoon
Kim Jin-Gyu
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Abstract
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Due to the miniaturization of semiconductor devices, their crystal structure on the nanoscale must be analyzed. However, scanning electron microscope-electron backscatter diffraction (EBSD) has a limitation of resolution in nanoscale and high-resolution electron microscopy (HREM) can be used to analyze restrictive local structural information. In this study, three-dimensional (3D) automated crystal orientation and phase mapping using transmission electron microscopy (TEM) (3D TEM-EBSD) was used to identify the crystal structure relationship between an epitaxially grown CdS interfacial layer and a Cu(InxGax-1) Se2 (CIGS) solar cell layer. The 3D TEM-EBSD technique clearly defined the crystal orientation and phase of the epitaxially grown layers, making it useful for establishing the growth mechanism of functional nano-materials.
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KEYWORD
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Cu(InxGax-1)Se2, Crystal structure, Electron backscattering diffraction, Solar cell, Transmission electron microscopy
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